Method for fabricating semiconductor type gas sensor array and semiconductor type gas sensor array

摘要

The present invention relates to a semiconductor type gas sensor technology , to form a film at the same time, several types of detection its purpose is to provide a semiconductor type gas sensor array and method of forming a semiconductor type gas sensor array to simplify the manufacturing process and ; to form the tin thin film on the substrate; To form a catalyst thin film on the tin foil ; Forming a tin film on the other area to form a catalyst thin film on the tin foil repeating at least once on the substrate; Wherein the two or more of the tin thin film / heat oxidation catalyst to form a semiconductor thin film at a time type gas sensor array comprising the steps of forming two or more detection method and a semiconductor type gas sensor array formed in this way .