METHOD AND APPARATUS FOR MODELING MULTIVARIATE PARAMETERS HAVING CONSTANTS AND SAME PATTERNS AND METHOD FOR FABRICATING SEMICONDUCTOR USING THE SAME

摘要

A method and a device for modeling multivariate parameters having a constant and the same pattern, and a semiconductor manufacturing method using the same are provided to realize multivariate modeling and correctly model a multivariate parameter by adding a random number to the constant or similar data, or adding the random number to one of the data having the same pattern. A data extractor(110) selects the data of the parameters, and finds an average and a standard deviation of the selected data. A data normalizer(120) normalizes the data of each parameter by using the average and the standard deviation. A data analyzer(130) analyzes a property of each parameter by using the normalized data. A model generator(140) generates a model based on analyzed property values. A data discriminator(150) discriminates whether each parameter includes the constant or the data similar to the constant by using the standard deviation, or discriminates whether the parameters have the same pattern by using eigenvector received from the data analyzer. A filter(160) provides the random data to the data extractor if the parameters include the constant or the data similar to the constant, or have the same pattern.