Hot-wire flow sensor LIQUIDS AND Gakhov

摘要

1.u0442u0435u0440u043cu043eu0430u043du0435u043cu043eu043cu0435u0442u0440u0438u0447u0435u0441u043au0438u0439 the flow of liquids and gases, constructed in the shape of a crystal containing a silicon frame, the membrane and the frame is the basis u043fu00a0u0442u044c pl. u0430u0442u0438u043du043eu0432u044bu0445 u0442u0435u0440u043cu043eu0447u0443u0432u0441u0442u0432u0438u0442u0435u043bu044cu043du044bu0445 resistors on the surface of the crystal, u043eu0442u043bu0438u0447u0430u044eu0449u0438u0439u0441u00a0 because the membrane is made from layers of u0447u0435u0440u0435u0434u0443u044eu0449u0438u0445u0441u00a0 and u043du0438u0442u0440u0438u0434u0430 u043au0440u0435u043cu043du0438u00a0, tol u0449u0438u043du044b which u0441u043eu043eu0442u043du043eu0441u00a0u0442u0441u00a0 (3 - 3.5): 1, and the thickness of its u043eu0431u0449u0430u00a0 not exceeding 2 microns.on the membrane under the central resistor by an additional heating resistor, isolated from the last u0441u043bu043eu00a0u043cu0438 u0434u0438u044du043bu0435u043au0442u0440u0438u043au0430.;2. on u0442u0435u0440u043cu043eu0430u043du0435u043cu043eu043cu0435u0442u0440u0438u0447u0435u0441u043au0438u0439 sensor 1, u043eu0442u043bu0438u0447u0430u044eu0449u0438u0439u0441u00a0, between the platinum resistors on the membrane are four cross cutting slit width over the entire length of 1 microns at the membrane and u043eu0442u0434u0435u043bu00a0u044eu0449u0438u0445 central resistor from the side and the side of the frame u043eu0441u043du043eu0432u0430u043du0438u00a0 air gap.;3. on u0442u0435u0440u043cu043eu0430u043du0435u043cu043eu043cu0435u0442u0440u0438u0447u0435u0441u043au0438u0439 sensor 1, u043eu0442u043bu0438u0447u0430u044eu0449u0438u0439u0441u00a0, u0438u0437u043eu043bu00a0u0446u0438u00a0 between the resistor and a heater made of u0441u043bu043eu00a0 Al2O3 or u0430u043bu043cu0430u0437u043eu043fu043eu0434u043eu0431u043du043eu0439 film.