Capacitive electrostatic the acceleration sensor, the use of the capacitive electrostatic acceleration sensor in an angular acceleration sensing means and in an electrostatic trigger

摘要

Capacitive electrostatic acceleration sensor with:a substrate (1);a first formed on the substrate carrier part (2);a first movable electrode (4) by means of the first support part is kept at a distance from the substrate in response to a physical quantity is exerted as to be displaceable,a second formed on the substrate carrier part (5); anda second movable electrode (7) which, by means of the second carrier part is kept at a distance from the substrate in response to a physical quantity is exerted as to be displaceable, and at least a portion of the first movable electrode opposite,in the case of the absolute values of the movement of the first and second movable electrodes during the action of acceleration are different.