Fluid`s e.g. gas, absolute pressure detecting assembly for aeronautic field, has cover fixed to micromechanical structure via sealing layer, and layer electrically isolating metallic layers from structure, with exception of contacts

摘要

The assembly has silicon on insulator type micromechanical structure with detection units (20a-20c) to detect deformation of a membrane (21b). A cover (600) is hermetically fixed to the structure via a sealing layer (700) and defines a closed cavity (800) above a surface (2) of the membrane. A passivation layer electrically isolates metallic layers from the structure, with the exception of electrical contacts. An independent claim is also included for a method to produce a fluid pressure detecting assembly.