LIQUID DROPLET JETTING INSPECTION EQUIPMENT AND LIQUID DROPLET JETTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide liquid droplet jetting inspection equipment, by which jetting of liquid droplets from a liquid droplet jetting head can easily be inspected with high precision and to provide a liquid droplet jetting device.;SOLUTION: The liquid droplet jetting device is provided with: a light projecting part 34 for guiding incident light, transmitting the guided light and irradiating an inspection substrate 31 having a photoconductive layer 31a emitting the transmitted light from the interface with a landed liquid droplet, with the transmitted light; a light receiving part 36 for receiving the light which is emitted from the light projecting part 34 and passes through the photoconductive layer 31a; and a decision part 37 for deciding occurrence of abnormal landing of the liquid droplet on the inspection substrate 31 on the basis of the intensity change of the light received by the light receiving part 36.;COPYRIGHT: (C)2007,JPO&INPIT