METHOD FOR IDENTIFYING TROUBLE IN MEASURING TOOL USED FOR MEASURING DESIRED DIMENSIONS IN MICROELECTRONIC MECHANISM, METHOD FOR IDENTIFYING TROUBLE IN MEASURING TOOL SYSTEM USED FOR MEASURING DESIRED DIMENSIONS, AND COMPUTER PROGRAM (MEASURING TOOL ERROR LOG ANALYSIS METHOD AND SYSTEM) FOR IDENTIFYING TROUBLE IN MEASURING TOOL SYSTEM

摘要

PPROBLEM TO BE SOLVED: To provide a method for identifying the trouble of a measuring tool system used for measuring the desired dimensions of a microelectronic mechanism. PSOLUTION: Each measuring tool of the system executes a plurality of recipes for measuring the desired dimensions of the microelectronic mechanism, and each recipe includes a series of commands for measuring at least one dimension of the microelectronic mechanism. The system includes an error log for storing trouble when measuring the dimensions of the microelectronic mechanism. The method includes a process for determining a normalized number of errors from the trouble stored in the error log to a recipe used for the measuring tool; a process for identifying at least one recipe having a maximum number of normalized errors in the error log; a process for identifying at least one identified recipe having a maximum number of normalized errors by a job list to be executed by the measuring tool; and a process for determining the cause of the error of at least one recipe from at least one identified recipe having a maximum number of normalized errors. PCOPYRIGHT: (C)2007,JPO&INPIT