POSITION MEASUREMENT DEVICE OF OBJECT USING LASER INTERFEROMETER SYSTEM

摘要

PROBLEM TO BE SOLVED: To enhance measurement precision of a laser interferometer used in an air conditioned space.;SOLUTION: The present invention relates to a position measurement device of an object (30). The measurement device comprises at least a laser interferometer system (29) for determining position movement of the object (30) towards at least a direction and also defining two laser axes, an air-conditioned room (40) having an inlet port region (42) and an exhaust port region (44) for housing at least one laser interferometer system (29), and a guiding means for directing at least a portion of an air current (46) passing through the air-conditioned room (40) to one region of laser axes (52, 54) of one laser interferometer system (29).;COPYRIGHT: (C)2007,JPO&INPIT