On the basis of the electric test data quality of gate insulating layer and method in order to control feature, the system in order to execute this

摘要

This invention, gate insulating layer (16) has dealt with various methods, and the system of controlling quality and feature in order to execute this generally, the electric test data (46) of on the basis. With illustrate one execution form, as for the above-mentioned method, step and later at least at least one electric test is executed in one semiconductor device executing one which includes the step which it decides on the basis of the electric data which at least can obtain at least one parameter of one which it executes in order one gate insulating layer (16) to forming at least in the semiconductor device which is formed process operation, from electric test and the parameter which is decided process operation at least, gate insulating layer (16) it possesses with the step which is formed.