MASS AXIS CALIBRATION METHOD IN TIME-OF-FLIGHT SECONDARY ION MASS ANALYSIS METHOD

摘要

PROBLEM TO BE SOLVED: To accurately obtain precise mass, with respect to the peak originating from the surface of a sample exceeding 500 in its mass number, in a time-of-flight secondary ion mass analysis method for obtaining the mass spectra of the surfaces of the samples, using a time-of-flight mass analyzer by irradiating the surfaces of the samples with pulsed primary ions.;SOLUTION: In TOF-SIMS measurement, a mass axis calibrating substance is arranged on the surface of the sample, and the signal originating from the surface of the sample and the signal originating from the mass axis calibrating substance are detected, at the same time. The mass axis calibrating substance is arranged on the surface of the sample by using a nebulizer. By using an ionic substance as the mass axis calibrating substance for higher precision calculation of the precise mass, with respect to unknown peaks exceeding 500 in mass number.;COPYRIGHT: (C)2007,JPO&INPIT