It is communicated in production mannered null rotating type vacuum seal feature and this rotating type vacuum seal feature of the barrier

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for forming a barrier film on the inner surface of a plastic vessel where a barrier film such as a carbon film of high film quality can be formed on the inner surface of a plastic vessel at a high speed.;SOLUTION: The apparatus comprises a plurality of film formation chambers communicating with a rotary vacuum seal mechanism through exhaust pipes and each forming a barrier film on the inner surface of a plastic vessel. Each exhaust pipe consists of an electrically conductive material, and an electric field shielding member having gas permeability and electrical conductivity is arranged at the desired position at the inside thereof. The film formation chamber is provided with: an external electrode having a cavity with a size to surround the vessel at the time when the vessel is inserted; an electrically conductive chamber header member fitted to the edge face of the external electrode on the side at which the mouth part of the vessel is located via an insulating member and connected and grounded with the exhaust pipe; a gas spouting member inserted into the vessel within the external electrode from the side of the chamber header member and through which barrier film formation gas is spouted; and an electric field impartation means for imparting an electric field to the space between the chamber header member grounded with the external electrode and the exhaust pipe.;COPYRIGHT: (C)2005,JPO&NCIPI