The quartz glass jig finishing liquid and uses that the treatment mannered

摘要

PROBLEM TO BE SOLVED: To obtain a silica glass jig surface-treating liquid stable in a composition ratio at a low cost. ;SOLUTION: This liquid for treating the surface of a silica glass jig is produced by mixing a main liquid comprising hydrogen fluoride, ammonium fluoride and water with an auxiliary liquid comprising ≥98% acetic acid. Therein, the hydrogen fluoride and the ammonium fluoride are contained in a total amount of 10-25wt.% and in a molar ratio of 0.5:1 to 2:1. The content of the acetic acid is 40-75wt.%.;COPYRIGHT: (C)1998,JPO