Substrate storage cassette breech operating mechanism and substrate storage cassette opening and closing manner

摘要

To provide an apparatus and a method for opening/closing substrate- housing cassette capable of eliminating a fault occurring due to a clearance between a key hole which is not decided by standards and a key decided by the standards. SOLUTION: The method for opening/closing the substrate-housing cassette comprises steps of setting the key hole 36a to a predetermined normal angle by further rotating the key 8 in the clockwise direction, for example and 1 deg. to 3 deg. and locking since the hole 36a will not be set to the predetermined angle by the clearance between the key 8 and the hole 36a as it is and if the key 8 is rotated in the clockwise direction by 90 deg. That is, the method comprises steps of increasing the rotation of the key 8 as compared with the normal locking angle of the hole 36a and locking.