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Being growth manner of the matrix of the growth mannered

机译:成长方式矩阵的成长方式

摘要

A method for forming a carbon nanotube array includes the following steps: providing a smooth substrate (11); depositing a metal catalyst layer (21) on a surface of the substrate; heating the treated substrate to a predetermined temperature in flowing protective gas; and introducing a mixture of carbon source gas and protective gas for 5-30 minutes, thus forming a carbon nanotube array (61) extending from the substrate. When the mixture of carbon source gas and protective gas is introduced, a temperature differential greater than 50° C. between the catalyst and its surrounding environment is created by adjusting a flow rate of the carbon source gas. Further, a partial pressure of the carbon source gas is maintained lower than 20%, by adjusting a ratio of the flow rates of the carbon source gas and the protective gas. The carbon nanotubes formed in the carbon nanotube array are well bundled.
机译:形成碳纳米管阵列的方法包括以下步骤:提供光滑的基板(11);在基板的表面上沉积金属催化剂层(21);在流动的保护气体中将处理过的基板加热到预定温度;引入碳源气体和保护气体的混合物5-30分钟,从而形成从基板延伸的碳纳米管阵列(61)。当引入碳源气体和保护气体的混合物时,通过调节碳源气体的流速在催化剂与其周围环境之间产生大于50℃的温差。此外,通过调节碳源气体和保护气体的流量比,将碳源气体的分压保持在低于20%。在碳纳米管阵列中形成的碳纳米管被很好地捆扎在一起。

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