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Test structure and method for failure analysis of small contacts in integrated circuit technology development
Test structure and method for failure analysis of small contacts in integrated circuit technology development
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机译:集成电路技术发展中小触点故障分析的测试结构和方法
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摘要
A method for failure analysis of small contacts in integrated circuits is provided. A number of opposing electrical contacts is configured to contact a sample in an offset pattern such that any one electrical contact may contact more than one conductor in the sample and any opposing electrical contact is offset-positioned to contact no more than one of the conductors contacted by the one electrical contact.
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