Bolometric detector, infrared detection device employing such a bolometric detector and process for fabricating this detector

摘要

A bolometric detector including a sensitive part having one or more layers of a sensitive material, the resistivity of which varies with temperature, electrodes isolated from one another, also acting as infrared radiation absorbers, the electrodes being in contact with the sensitive material over at least part of their surface, at least one support region for supporting the sensitive part, acting so as to position the sensitive part, and acting as an electrical conductor, in relation to a read circuit associated with the bolometric detector, and at least one thermal insulation structure electrically and mechanically connecting each support region to the sensitive part. The regions of sensitive material not in contact with the electrodes have at least one corrugation oriented along the direction perpendicular to the plane containing the sensitive part of the bolometric detector.