POWDER REMOVING DEVICE OF SCRUBBER FOR PROCESSING SEMICONDUCTOR BY-PRODUCT GAS

摘要

A powder removing apparatus of a scrubber for processing a semiconductor byproduct gas is provided to prevent various powders from being deposited on an inner wall of a combustion chamber by supplying a gas pulse wave with a predetermined pressure onto the inner wall of the combustion chamber using a powder removing gas supply unit. A scrubber for processing a semiconductor byproduct gas includes a burner(120) for receiving the byproduct gas generated from a semiconductor manufacturing process and performing a combustion process on the byproduct gas, a combustion chamber, and a powder removing apparatus. The combustion chamber(130) is connected with the burner. Various powders generated from the combustion process fall in the combustion chamber. The powder removing apparatus prevents the various powders from being deposited on an inner wall of the combustion chamber by supplying a predetermined gas endowed with pressure onto the inner wall of the combustion chamber. The powder removing apparatus includes a power removing gas supply unit(170).