LARGE-SIZE OLED MANUFACTURING APPARATUS USING INK-JET PRINTING TECHNIQUES AND LOW MOLECULE THERMAL DEPOSITION TECHNIQUES

摘要

The present invention relates to in-line (in-line) OLED manufacturing apparatus for manufacturing the OLED while the substrate is moved to the linear is the chambers are connected linearly to be used in OLED production. ; OLED manufacturing apparatus according to the present invention in-line as a device, a plurality of transfer chambers and the buffer chamber are alternately arranged to form a line, and is arranged, each loading chamber or unloading chamber, transportation chamber which is arranged at each end, the transport chamber has a structure in which a process chamber capable of performing the respective steps for the manufacture OLED substrates are disposed. ; The organic EL, OLED, in-line manufacturing apparatus, the layout