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Wafer Transfer having Structure for Mapping Wafer and Method for Mapping Wafer loaded in Boat thereof
Wafer Transfer having Structure for Mapping Wafer and Method for Mapping Wafer loaded in Boat thereof
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机译:具有用于测绘晶圆的结构的晶圆转移及其在船上装载的用于测绘晶圆的方法
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摘要
A wafer transfer with a structure for mapping a wafer and a method for mapping the wafer loaded in a boat using the same are provided to reduce an apparatus size and to simplify an apparatus structure by detecting a wafer loading state of the boat using a conventional wafer transfer without an additional apparatus. A wafer transfer includes a head, a horizontal transfer unit, a spin driving unit, a vertical driving unit, a sensing unit, and a control unit. The head(10) includes fingers vertically spaced apart from each other. The horizontal transfer unit(20) is connected with the head in order to freely move the head on X-Y plane. The spin driving unit(30) is connected with the horizontal transfer unit in order to rotate the horizontal transfer unit on the X-Y plane. The vertical driving unit(40) is connected with the spin driving unit in order to move the spin driving unit up and down in a Z-axis direction. The vertical driving unit includes a detecting part capable of detecting the height of the spin driving unit. The sensing unit is installed at one end of one finger in order to detect a wafer loading state of a boat. The control unit is used for controlling a detection point of the sensing unit and determining a detection end point of the sensing unit.
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