首页> 外国专利> Process gas`s temperature measuring method, involves guiding and receiving electromagnetic radiation via process gases, and determining temperature of process gases using measured spectral absorption properties of gas component

Process gas`s temperature measuring method, involves guiding and receiving electromagnetic radiation via process gases, and determining temperature of process gases using measured spectral absorption properties of gas component

机译:工艺气体的温度测量方法,包括通过工艺气体引导和接收电磁辐射,以及使用测得的气体成分的光谱吸收特性确定工艺气体的温度

摘要

The method involves guiding and receiving an electromagnetic radiation via process gases (30) by a radiation source (210), and measuring spectral absorption properties of a gas component of the process gases in a region of absorption line of the gas component. Temperature of the process gases is determined using the measured spectral absorption properties of the gas component. Wavelength of a radiation source in a wavelength region is tuned in the region of the absorption line. Absorption line width of the absorption line is determined. An independent claim is also included for a measuring device for measuring temperature of a process gas.
机译:该方法包括通过辐射源(210)经由过程气体(30)引导和接收电磁辐射,以及在气体成分的吸收线区域中测量过程气体的气体成分的光谱吸收特性。使用所测量的气体组分的光谱吸收特性来确定工艺气体的温度。在吸收线的区域中调谐波长区域中的辐射源的波长。确定吸收线的吸收线宽度。还包括用于测量过程气体温度的测量装置的独立权利要求。

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