Interferometric measuring device for e.g. optical distance measurement in quality control, has reference and modulation interferometers, and dispersive optical component that is arranged in one of optical paths of reference interferometer

摘要

The device has a modulation interferometer (2) with two modulation interferometer optical paths (24, 25) and a reference interferometer (3) provided downstream to the interferometer (2), where the radiation is divided into two optical paths (34, 35) of the interferometer (3). A dispersive optical component (10) is arranged in one of the optical paths of the interferometer (3) and formed as a fiber-Bragg-grid or prism. The interferometer (3) is formed as an interferometric measuring system for an adjusting unit of the interferometer (2).