Total oxygen content and total carbon content determining method for light emitting diode manufacturing areas, involves determining total oxygen content from water content and total carbon content from methane content

摘要

The method involves decomposing ammonium gas stream (2) into nitrogen and hydrogen. The oxygen containing compounds are converted to water and the carbon containing compounds are converted to methane. The water content and the methane content in gas are determined. The total oxygen content is determined from the water content and the total carbon content is determined from the methane content. An independent claim is also included for a device for determining the total oxygen content and the total carbon content.