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Lubricant-free vacuum pump used as a turbo molecular pump comprises a gas bearing surface facing a shaft and/or a gas bearing rotor and having a hard layer
Lubricant-free vacuum pump used as a turbo molecular pump comprises a gas bearing surface facing a shaft and/or a gas bearing rotor and having a hard layer
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机译:用作涡轮分子泵的无润滑剂真空泵包括面对轴和/或气体轴承转子并具有硬质层的气体轴承表面
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摘要
Lubricant-free vacuum pump (1) comprises a gas bearing surface facing a shaft (4) and/or a gas bearing rotor and having a hard layer with a layer thickness of 0.5-30 mu m. The material of the hard layer has a micro-hardness of at least 1000 HK at 0.01 N measuring force. An independent claim is also included for a method for the production of a gas bearing for a vacuum pump.
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