首页> 外国专利> Specimen imaging method, involves depositing specimen on indirect-gap semiconductor substrate, energizing substrate with potential, and scanning specimen by melt point, where gap is greater than specific electron volts

Specimen imaging method, involves depositing specimen on indirect-gap semiconductor substrate, energizing substrate with potential, and scanning specimen by melt point, where gap is greater than specific electron volts

机译:样品成​​像方法包括将样品沉积在间接间隙半导体衬底上,使衬底通电,并通过熔点大于特定电子伏特的熔点扫描样品

摘要

The method involves depositing a specimen on an indirect-gap semiconductor substrate, and energizing the substrate with a potential. The gap is greater than 1.5 electron volts, and excitation energy of the specimen is lesser than the value of the gap. The specimen is scanned by a metal point at another potential such that a potential difference between the potentials allows the occurrence of a tunneling current between the substrate and the metal point. Photons are detected, and the substrate is made of beta silicon carbide or gallium phosphide. Independent claims are also included for the following: (1) an imaging device for implementing a photon-emission scanning tunnel imaging method (2) a semiconductor substrate for implementing a photon-emission scanning tunnel imaging method.
机译:该方法包括在间接间隙半导体衬底上沉积样本,并用电势激励衬底。该间隙大于1.5电子伏特,并且样品的激发能小于该间隙的值。用另一个电位的金属点扫描样品,以使电位之间的电位差允许在基板和金属点之间出现隧穿电流。检测到光子,并且基板由β碳化硅或磷化镓制成。还包括以下方面的独立权利要求:(1)用于实现光子发射扫描隧道成像方法的成像装置(2)用于实现光子发射扫描隧道成像方法的半导体基板。

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