METHOD OF CONSTRUCTING THREE-DIMENSIONAL SHAPE FROM SURFACE DATA BY THREE-DIMENSIONAL SURFACE SHAPE MEASURING INSTRUMENT, AND METHOD OF MEASURING THICKNESS OF PLATE-LIKE OBJECT

摘要

PROBLEM TO BE SOLVED: To provide a method of constructing a three-dimensional shape of high-accuracy measured surface data by a three-dimensional surface shape measuring instrument, and to provide a method of measuring thickness of a plate-like object.;SOLUTION: A sphere is used as a tool for positioning. A center coordinate of the sphere to serve as a reference point is identified from a plurality of measured surface position coordinates. Center coordinates of three or more identified spheres having different diameters are used as different reference points. Respective data are combined by numerical computation, from a condition where the reference points are common in the respective surface data to construct the three-dimensional shape. In addition, position data of a front surface and a rear surface expressed by common coordinates for the platelike object are used and the thickness is evaluated.;COPYRIGHT: (C)2008,JPO&INPIT