PROCESS FOR ADJUSTING FEED RATE IN ELECTRON-BEAM PHYSICAL VAPOR DEPOSITION APPARATUS, ELECTRON BEAM PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD FOR MANUFACTURING MULTI-COMPONENT CONDENSATE FREE OF LAMINATION USING THE APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an EB-PVD (Electron-Beam Physical Vapor Deposition) apparatus equipped with an independent system designed to monitor and maintain a constant relative level of the molten pool within the EB-PVD chamber.;SOLUTION: A process for adjusting a feed rate in an electron-beam physical vapor deposition apparatus includes the steps of: positioning a target at first height within a chamber of an electron-beam physical vapor deposition apparatus; feeding the target at a prediscribed rate into a beam of electrons generated by an electron gun of the electron-beam physical vapor deposition apparatus; evaporating the target with the beam of electrons; monitoring the first height by measuring a difference between a first light intensity and a second light intensity of at least one image of the target using an optical sensor disposed proximate to the chamber; determining a change in the first height; and adjusting a target feed rate.;COPYRIGHT: (C)2008,JPO&INPIT