FOCUS ADJUSTING DEVICE, INSPECTING DEVICE, FOCUS ADJUSTING METHOD, FOCUS ADJUSTING PROGRAM, AND RECORDING MEDIUM READABLE BY COMPUTER

摘要

PROBLEM TO BE SOLVED: To adjust focus suitable for inspecting a panel to be inspected.;SOLUTION: The inspecting device 1 has an image analyzing section 61. For a liquid crystal panel 50 in which at least one defect picture element and a plurality of satisfactory picture elements near the defect picture element are lighted on, the image analyzing section 61 associates pickup images taken a number of times while the focusing position of an imaging device 2 is altered, with focus position information indicating focusing positions located when the pickup images are photographed. The image analyzing section 61 also calculates an artificial defect picture element contrast value and a satisfactory picture element contrast value for each of the pickup images, and calculates the degree of separation from the defect, which indicates the degree of difference between the calculated artificial defect picture element contrast value and the calculated satisfactory picture element contrast value. The inspecting device 1 also has a focusing position determining section 64 that determines the focusing position of the imaging device 2 based on the degree of separation, calculated by the image analyzing section 61.;COPYRIGHT: (C)2009,JPO&INPIT