ATMOSPHERIC PRESSURE SENSOR, HARD DISK DRIVE PROVIDED WITH THE SAME, METHOD OF MANUFACTURING THE ATMOSPHERIC PRESSURE SENSOR AND METHOD OF MEASURING ATMOSPHERIC PRESSURE

摘要

PPROBLEM TO BE SOLVED: To provide an atmospheric pressure sensor capable of precisely measuring the atmospheric pressure with a simple structure. PSOLUTION: The atmospheric sensor comprises: a hermetic sealed cabinet formed with a hermetic sealed space internally; a first thin plate member for constituting at least a part of wall face varying the volume of the closed space corresponding to the external atmospheric pressure; a first PZT for detecting the natural frequency of the thin plate member while abutting on the first thin plate part; a second thin plate part having the same vibration performance identically equal to the first thin plate member for providing externally on the hermetic cabinet while abutting on the hermetic sealed cabinet; and a second PZT having the same temperature performance as the first PZT for detecting the natural frequency of the second thin plate member while abutting on the second thin plate member. PCOPYRIGHT: (C)2008,JPO&INPIT