METAL THIN FILM, FORMING METHOD OF METAL THIN FILM, SOLID OXIDE FUEL CELL USING METAL THIN FILM, HYDROGEN PUMP, MEMBRANE REACTOR, HYDROGEN PURIFICATION DEVICE, AND SOLID OXIDE STEAM ELECTROLYTIC DEVICE

摘要

PPROBLEM TO BE SOLVED: To provide a metal thin film improved in atom permeability even at working temperatures of 400-600C. PSOLUTION: A metal composition and an oxide dispersed in grain boundaries of the metal composition are included. A metal target composing the metal composition and an oxide target composing the oxide are formed at the same time by sputtering. The oxide is composed of either one element of zirconia, lanthanum gallate, and ceria. The metal composition is composed of an alloy containing as the main component one, or two or more of copper, silver, platinum, palladium, and gold. PCOPYRIGHT: (C)2009,JPO&INPIT