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STATIC PRESSURE GAS BEARING MECHANISM, SHAFT ROTATION DEVICE USING THE SAME AND SPINDLE MOTOR
STATIC PRESSURE GAS BEARING MECHANISM, SHAFT ROTATION DEVICE USING THE SAME AND SPINDLE MOTOR
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机译:静压气体轴承机构,使用相同和主轴电机的轴旋转装置
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摘要
PROBLEM TO BE SOLVED: To provide a static pressure gas bearing mechanism capable of using merits of a floating bushing capable of providing relatively high rigidity and excellent high speed stability, providing higher first order resonance speed, improving stable limit speed further, and making a structure simple, and a shaft rotation device using the same and a spindle motor.;SOLUTION: The static pressure gas bearing mechanism 2 is provided with a hollow body 11, the floating bushing 15 provided in the inside 14 of the hollow body 11 with keeping a gap 13 to the hollow body 11, a spindle 17 provided in the inside 14 of the hollow body 11 with keeping a gap 16 to the hollow body 11 and the floating bushing 15 and rotatable to the hollow body 11, a charge passage 19 for charging high pressure air from an outside 18 of the hollow body 11 to the inside 14 of the hollow body 11, and an discharge passage 20 for discharging high pressure air from the inside 14 of the hollow body 11 to an outside 18 of the hollow body 11.;COPYRIGHT: (C)2008,JPO&INPIT
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