METHOD OF MANUFACTURING ANTIREFLECTION STRUCTURAL BODY, MOLDING DIE USING ANTIREFLECTION STRUCTURAL BODY AND METHOD OF MANUFACTURING GLASS FORMED ARTICLE OR RESIN MOLDED ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an antireflection structural body easily and inexpensively.;SOLUTION: An X-ray sensitive film 11 is formed on a substrate 10. A plurality of particulate bodies 12 which transmit X-ray are arranged on the X-ray sensitive film 11 with a pitch of light wavelength or less where light reflection is suppressed by a light reflection preventive rugged structure 3. An X-ray shielding film 14 containing an X-ray shielding material is formed so as to cover the plurality of particulate bodies 12 therewith from above the plurality of arranged particulate bodies 12. The X-ray sensitive film 11 is irradiated with X-ray from above the X-ray shielding film 14, and then developed, thereby, the X-ray sensitive film 11 is patterned into a prescribed pattern. The substrate 10 is etched from above the patterned X-ray sensitive film 11, thereby, the light reflection preventive rugged structure 3 is formed on the substrate 10 for obtaining the antireflection structural body.;COPYRIGHT: (C)2008,JPO&INPIT