DEFECTIVE DATA PROCESSOR, DEFECTIVE DATA PROCESSING SYSTEM, AND DEFECTIVE DATA PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a defective data processor which can effectively evaluate error of inspection results by a plurality of inspection apparatus, a defective data processing system, and a defective data processing method.;SOLUTION: Multiple observation information obtained by observing defect by means of an observation device 2 is input based on multiple inspection information obtained by inspecting defect on the same inspection objects by inspection devices 1A, 1B, and position information of defect obtained for each inspection. Multiple defect distributions 31A, 31B shown by a plot point 48 disposed based on position information of defect obtained for each inspection are displayed simultaneously on a screen 30, in a display which shows treatment results using the input multiple inspection information and multiple observation information. When an arbitrary plot point on a screen of a display 5c is selected by an input part 5d, inspection information and observation information of defect corresponding to the selected plot points 48a, 48b are shown in the display 5c.;COPYRIGHT: (C)2008,JPO&INPIT