Electron beam position fluctuation measuring method, electron beam position fluctuation measurement equipment and electron beam recording device

摘要

Preceding the record of the electron beam recording device, at the time of the measurement of the beam position fluctuation which is done, at the same time stability measurement of the accurate fluctuation quantity is made possible. Preceding record, the measurement equipment 10 which measures the position fluctuation of electron beam E _P, the knife edge 11 which is arranged in lighting position of beam spot E _P and through the knife edge 11, in order for the center of beam spot E _P to become advanced position of the knife edge 11 on the basis of the output of filter expedient (high pass cut-off filter 14 and the like) and this filter expedient which remove the fluctuation frequency component of the measuring object from output of detection expedient (Faraday cup 12 and the like) and this detection expedient which detect the electron beam E which is irradiated, the control means which control the standard position of electron beam EIt has with 15, the case where the center of beam spot E _P slips from the point of the knife edge 11 it measures the position fluctuation of beam spot E _P due to the output change of detection expedient.