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Trench isolation having a self-adjusting surface seal and method for producing one such trench isolation
Trench isolation having a self-adjusting surface seal and method for producing one such trench isolation
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机译:具有自调节表面密封件的沟槽隔离件以及用于产生这种沟槽隔离件的方法
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摘要
The invention relates to a trench isolation with a self-aligning surface sealing and a fabrication method for said surface sealing. In this case, the surface sealing may have an overlap region of the substrate surface or a receded region into which extends an electrically conductive layer formed on the substrate surface.
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