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Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters
Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters
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机译:中波谱椭圆偏光法在多层交替高/低折射率滤光片原位实时制备中的应用
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摘要
Disclosed is application of oblique angle of incidence, reflection and/or transmission mode spectroscopic ellipsometry PSI and/or DELTA, (including combinations thereof and/or mathematical equivalents), vs. wavelength data over an intermediate wavelength band range around a pass or reject band, to monitor and/or control fabrication of multiple layer high/low refractive index band-pass, band-reject and varied attenuation vs. wavelength thin film interference filters, either alone or in combination with transmissive non-ellipsometric electromagnetic beam turning point vs. layer data obtained at an essentially normal angle of incidence.
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