Probe-holding apparatus, sample-obtaining apparatus, sample-processing apparatus, sample-processing method and sample-evaluating method

摘要

A sample processing apparatus includes a probe, a probe mover for moving the probe such that the probe is brought into contact with a part of a sample, an adhering device for adhering the probe to the part of the sample, and an ion beam generator for irradiating the sample with an ion beam to separate the part of the sample from a remaining body of the sample. A temperature controller controls temperatures of the probe and the sample individually to prevent a temperature change of the part of the sample when the probe is bought into contact with the part of the sample and when the sample is irradiated with an ion beam by the ion beam generator.