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Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections
Image alignment method, comparative inspection method, and comparative inspection device for comparative inspections
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机译:图像对准方法,比较检查方法以及用于比较检查的比较检查装置
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摘要
The present invention provides a high-precision alignment method, device and code for inspections that compare an inspection image with a reference image and detect defects from their differences. In one embodiment an inspection image and a reference image are divided into multiple regions. An offset is calculated for each pair of sub-images. Out of these multiple offsets, only the offsets with high reliability are used to determine an offset for the entire image. This allows high-precision alignment with little or no dependency on pattern density or shape, differences in luminance between images, and uneven luminance within individual images. Also, detection sensitivity is adjusted as necessary by monitoring alignment precision.
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