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SYSTEM AND METHOD FOR CONTROLLING INTENSITY OF A BEAM OF ELECTROMAGNETIC RADIATION IN ELLIPSOMETERS AN POLARIMETERS
SYSTEM AND METHOD FOR CONTROLLING INTENSITY OF A BEAM OF ELECTROMAGNETIC RADIATION IN ELLIPSOMETERS AN POLARIMETERS
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机译:椭圆计和参量中的电磁辐射束强度控制系统和方法
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摘要
An ellipsometer or polarimeter system and method for controlling intensity of an electromagnetic beam over a spectrum of wavelengths by applying control (P2) and beam (P) polarizers, optionally in combination with an intervening and control compensator (C).
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