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DEEP UV TELECENTRIC IMAGING SYSTEM WITH AXISYMMETRIC BIREFRINGENT ELEMENT AND POLAR-ORTHOGONAL POLARIZATION
DEEP UV TELECENTRIC IMAGING SYSTEM WITH AXISYMMETRIC BIREFRINGENT ELEMENT AND POLAR-ORTHOGONAL POLARIZATION
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机译:具有对称双折射元件和正交正交极化的深紫外遥测成像系统
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摘要
Axisymmetric birefringent materials are incorporated into a deep UV imaging system by exploiting axial symmetries. A polar orthogonal polarization pattern is relayed conjugate to a pupil of a telecentric imaging system to avoid birefringence of axisymmetric birefringent optics located in telecentric object or image space.
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