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A method for preparing carbon nanotubes field emitter arrays fabricated on anodic aluminum oxide membrane bonded on silicon wafer
A method for preparing carbon nanotubes field emitter arrays fabricated on anodic aluminum oxide membrane bonded on silicon wafer
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机译:一种制备在结合在硅片上的阳极氧化铝膜上的碳纳米管场致发射体阵列的方法
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摘要
the present invention is a carbon nanotube field emission device manufacturing method as the film (membrane) in the form of nano-porous alumina creating a frame bonded to hydrogen bond to the silicon wafer surface and to increase the temperature in the state under pressure and bonded to a silicon wafer with nano framework with ether bond, an extension of the diameter of the pores of the nano-frame junction were formed in the pore The development of technologies for producing carbon nanotube field emission device made by using a metal nanoparticle catalyst. ; said bonded alumina after filling the other metal ion concentration in the pore solution and the acid solution was extended with the diameter of the pores of the nano-mold by evaporation of a predetermined size and a nanoparticle catalyst in the form is prepared, and a method for controlling the diameter of the carbon nanotubes by using this. ; application of the carbon nanotube as an electron emission source of field emission devices of the tip to form an excellent field emission device can be implemented.
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