SILOXANE POLYMER, PREPARATION METHOD THEREOF, POROUS-FILM FORMING COATING SOLUTION CONTAINING THE POLYMER, POROUS FILM, AND SEMICONDUCTOR DEVICE USING THE POROUS FILM

摘要

A siloxane polymer is provided to form porous films having improved mechanical strength without doing damage to a low dielectric constant. A method for preparing siloxane polymer by hydrolysis and condensation of a hydrolyzable silane compound includes the steps of: preparing a salt of a silsesquioxane cage compound represented by the following formula 1 of (SiO_1.5-O)_n^(n-)X^(+)_n or an aqueous solution of the sa and hydrolyzing the hydrolyzable silane compound to condense the resultant to silanol terminal groups of the silsesquioxane cage compound. In the formula 1, X represents NR4, Rs are identical to and different from one another and independently represent a linear or branched C1-4 alkyl group, and n is an integer between 6 and 24.