Fabrication of microstructures for micro/nano-fluidic devices and MEMS microdevices using inorganic polymers and hydrophilic polymers

摘要

A method for manufacturing inorganic micro-fluidic channels is provided to produce polymeric micro-fluidic channels having excellent organic solvent permeability resistance, and reduce production expense and time. A method for manufacturing inorganic micro-fluidic channels includes the steps of: coating a substrate with an inorganic polymer precursor to form a coating layer; placing a micropattern-formed mold on the coating layer to transfer the pattern to the coating layer; removing the mold, and then carrying out light or heat curing; and further performing pyrolysis at 600-1200 ‹C after the curing.