首页>
外国专利>
Scanning microscope e.g. confocal scanning microscope, for use in micro-system technology, has signal detector arranged in optical path such that radiation is formed on detector, where focusing device is connected with scanner control unit
Scanning microscope e.g. confocal scanning microscope, for use in micro-system technology, has signal detector arranged in optical path such that radiation is formed on detector, where focusing device is connected with scanner control unit
The microscope has a light source emitting measuring radiation on an object (6). The radiation reflected by the object as reflection radiation enters in an optical path. A scanner control unit (11) controls a sliding unit (10) by control signals. A signal detector is arranged in the optical path such that the reflection radiation is formed on the detector, where a focusing device (16) is connected with the control unit. The control unit controls a signal storage unit (13) such that the series of measurement with two measuring signals is stored for a measuring point on the object.
展开▼