Vacuum pump e.g. dry piston vacuum pump, has sensor located between pump stages, and evaluation unit connected with motor control to transmit evaluated signal so that control changes rotational speed of motor based on evaluated signal

摘要

The pump (1) has a motor (8) for driving pump-active elements of two pump stages (2, 3). A transmission unit (7) transmits driving power from the motor to the pump-active elements, and a motor control (9) controls a rotational speed of the motor. An evaluation unit (12) is connected with a pressure-sensitive signal sensor (10), which is located between the stages, to receive a signal generated by the sensor. The evaluation unit is connected with the motor control to transmit an evaluated signal so that the control changes the rotational speed of the motor based on the evaluated signal. An independent claim is also included for a method for operating a vacuum pump with a motor having two different rotational speeds.