Method for interferometric determination of deviation of actual shape of effective reflection surface of test object from reference shape of effective reflection surface, involves producing electromagnetic light radiation

摘要

The method involves producing an electromagnetic light radiation (24) by an illuminating device (16), which is provided as input wave (30). The input wave runs through a diffractive optical element (18) and leaves as incoming measuring wave (42). The reflected measuring wave (44) runs through the diffractive optical element and leaves as outgoing measuring wave (46). An intensity distribution of an interference pattern, which is produced by the interference of the reference wave with the outgoing measuring wave is detected by a detection device (20). An independent claim is also included for a device for interferometric determination of a deviation of an actual shape of an effective reflection surface of a test object from a reference shape of the effective reflection surface.