Method for rotation coating of disk-shaped substrate involves applying viscous liquid on substrate and substrate is rotated for distributing liquid

摘要

The method involves applying a viscous liquid on the substrate (2) and substrate is rotated for distributing the liquid. The layer thickness of the liquid applied on the substrate is measured and is regulated by varying the viscosity of the applied liquid and/or by the number of revolutions of the rotation in dependence of the measured layer thickness. An independent claim is also included for a device for rotation coating of a disk-shaped substrate.