Workpiece surface's periodic microstructures detection method, involves utilizing transformation illustrating accurately line-shaped periodic microstructure on points of transformation area, on local image signal set

摘要

The method involves sensing a workpiece surface along a scanning line using a sensor, which supplies electrical output signals assigned to a characteristic of a workpiece surface such that the output signals received along the scanning line are arranged to a local image-signal set. The image-signal set represents a local image of the workpiece surface. A transformation illustrating an accurately line-shaped periodic microstructure on points of a transformation area, is utilized on the local image signal set, so that a transformation image signal set is received. An independent claim is also included for a device for implementing a method for detection of periodic microstructures on a workpiece surface.