ELECTRON BEAM OBSERVATION DEVICE USING PRE-SPECIMEN MAGNETIC FIELD AS IMAGE-FORMING LENS AND SPECIMEN OBSERVATION METHOD

摘要

PROBLEM TO BE SOLVED: To solve a problem that, since an objective lens having the most important role in electromagnetic lenses used for an electron microscope achieves a short focal length by a large exciting current to perform high spatial resolution, on the other hand, in case if it is used for dimension instrumentation, reproducibility of image forming condition is insufficient due to magnetic hysteresis, as well as observation in a low magnification of about 200 to 2,000 times is difficult, and also, since the specimen is disposed in a magnetic field generated in the objective lens, the specimen is observed in a state of being always immersed in a magnetic field.;SOLUTION: The electron beam observation device includes a mechanism which disposes a specimen at an upstream side in an electron beam traveling direction outside an objective lens, from which an image is transferred under a magnification of 1/5 to 1/30, in addition to an inside of the objective lens in which a specimen is disposed at a time of ordinary observation.;COPYRIGHT: (C)2009,JPO&INPIT