CHARACTERISTIC DISTRIBUTION ANALYSIS METHOD AND APPARATUS, SUBSTRATE CLASSIFICATION METHOD AND APPARATUS, PROGRAM FOR ALLOWING COMPUTER TO EXECUTE CHARACTERISTIC DISTRIBUTION ANALYSIS METHOD OR SUBSTRATE CLASSIFICATION METHOD, COMPUTER-READABLE RECORDING MEDIUM STORING PROGRAM, AND CLASSIFICATION CRITERION DATA

摘要

PROBLEM TO BE SOLVED: To provide a characteristic distribution analysis method for hierarchically setting classification criteria for classifying substrates.;SOLUTION: A characteristic distribution analysis method includes: a step (S101) of preparing a first-layer distinction distribution group composed of a set of distinction distributions which represent distinctions of the characteristic distributions of respective substrates; a step (S102) of quantitatively evaluating the degree of similarity between the characteristic distributions of the respective substrates and the respective distinction distributions; a step (S103) of quantitatively evaluating associations among some distinction distributions, which are included in the first-layer distinction distribution group and appear simultaneously on the identical substrate, on the basis of the degree of similarity; a step (S104) of integrating some distinction distributions included in the first-layer distinction distribution group on the basis of the associations while maintaining the positions of the respective distinction distributions on the substrates so as to prepare a new distinction distribution on an assumed substrate; and a step (S105) of setting a set of the new distinction distribution and the distinction distributions in the first-layer distinction distribution group except for those subjected to the integration as a second-layer distinction distribution group.;COPYRIGHT: (C)2010,JPO&INPIT