ULTRA-BROADBAND ULTRAVIOLET MICROSCOPE VIDEO SYSTEM WITH WIDE RANGE ZOOMING FUNCTION

摘要

PROBLEM TO BE SOLVED: To provide an ultra-broadband ultraviolet (UV) catadioptric video microscope system with a wide-range zooming function.;SOLUTION: The microscope system including a catadioptric lens group and a zooming tube lens group, has a high optical resolution at ultra-UV wavelengths, a continuously adjustable magnification, and a high numerical aperture. This system integrates microscope modules such as objective lenses, tube lenses, and a zoom optics to reduce the number of components and simplify the manufacturing processes of the system. In a preferable embodiment, excellent image quality is obtained across a very wide ultra-ultraviolet spectrum range when combined with an all-refractive zooming tube lens. The zooming tube lens is modified to compensate for higher-order chromatic aberrations that would normally limit performance.;COPYRIGHT: (C)2009,JPO&INPIT